Current research projects Spatial Light Modulator for Maskless LithographyIn vivo Dual-Axes Confocal MicroscopyPhotonic Crystal SensorsQuantitative Phase Microscopy

About

We focus our research on design and fabrication of micro-optical and nano-optical devices that combine MEMS, photonic crystals, integrated optics, and free-space optics. By utilizing the resolving and diffractive properties of MEMS arrays, we create efficient and reliable systems for fiber-optics, free-space communication, displays, adaptive optics, spectroscopy, and instrumentation for biological studies.

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Recent Work

  • D. Lee, K. Yu, U. Krishnamoorthy, O. Solgaard, “Vertical Mirrors Fabrication Combining KOH Etch and DRIE of (110) Silicon”, IEEE Journal of MicroElectroMechanical Systems (JMEMS), Vol. 18, No. 1, 2009.
  • D. Lee, K. Yu, U. Krishnamoorthy, O. Solgaard, “Vertical Mirrors Fabrication Combining KOH Etch and DRIE of (110) Silicon”, IEEE Journal of Microelectromechanical Systems, Vol. 18, No. 1, 2009.
  • O. Kilic, S. Fan, O. Solgaard, “Analysis of guided-resonance based polarization beam splitting in photonic crystal slabs”, Journal of the Optical Society of America A, Vol. 25, No. 11, 2008.
  • More publications...